Radiation detection systems and methods
AssigneeCerium Laboratories LLC
InventorsTim Z Hossain, Mark Clopton, Clayton Fullwood
Life of this patent
Estimating the term…
Abstract
A method of forming a radiation detector includes forming a stack including a plurality of arrays of radiation detection devices. Forming an array of the plurality of arrays includes forming a polysilicon layer over an interlayer dielectric layer of another array of the plurality of arrays; forming charge storage layers over the polysilicon layer; forming a second polysilicon layer over the charge storage layers; etching the second polysilicon layer to form gate stacks; and depositing an interlayer dielectric disposed on at least three sides of the gate stacks, the interlayer dielectric including a radiation reactive material.
Claims20
A radiation detector comprising:
- a semiconductor substrate;
- a radiation detection stack comprising a plurality of arrays of radiation detection devices, each array of the plurality of arrays of radiation detection devices including a set of gate stacks disposed over a plurality of source/drain regions, each gate stack of the set of gate stacks including a gate layer disposed adjacent a charge storage structure, each array including an interlayer dielectric formed of a radiation reactive material, the interlayer dielectric surrounding the set of gate stacks on at least three sides;
- and
- a plurality of metal structures disposed over the radiation detection stack, the metal structures defining a set of word line and a set of bit lines.
A radiation detector comprising:
- a semiconductor layer comprising first and second source/drain regions and a gate region disposed between the source/drain regions;
- a gate stack disposed over the gate region of the semiconductor layer, the gate stack including a gate layer disposed adjacent a charge storage structure;
- and
- a radiation reactive structure disposed around the gate stack and surrounding the gate stack on at least three sides, the radiation reactive structure formed of a radiation reactive material.
Dependencies are inferred from the claim text.