Fabrication and use of nanocoils on nitrogen-vacancy diamond substrates for magnetic field detection and manipulation

A magnetic field detector comprising:

• a spiral inductor comprising:
• a nitrogen vacancy diamond substrate;
• a barrier layer of dielectric material on a surface of the nitrogen vacancy diamond substrate;
• a spiral nanocoil comprising an electrically conductive material on a surface of the barrier layer of dielectric material;
• an overlayer of dielectric material disposed over the spiral nanocoil;
• a first electrode contact on a first end of the spiral nanocoil;
• and
• a second electrode contact on a second end of the spiral nanocoil;
• an optical excitation source positioned to direct excitation radiation onto the nitrogen vacancy diamond substrate and the spiral nanocoil;
• and
• an optical detector positioned to detect a fluorescence signal generated by the nitrogen vacancy diamond.

A method of fabricating a spiral inductor, the method comprising:

• depositing a barrier layer of dielectric material on a surface of a nitrogen vacancy diamond substrate;
• forming a layer of an electron-beam resist on a surface of the barrier layer of dielectric material;
• defining a spiral nanocoil pattern in the layer of the electron-beam resist using positive electron-beam lithography;
• depositing an electrically conductive material in the spiral nanocoil pattern to form a spiral nanocoil comprising the electrically conductive material on the surface of the barrier layer of dielectric material;
• removing the remaining electron-beam resist from the surface of the barrier layer of dielectric material;
• depositing an overlayer of dielectric material over the spiral nanocoil;
• forming a first electrode contact on a first end of the spiral nanocoil;
• and
• forming a second electrode contact on a second end of the spiral nanocoil.