Probe card including power compensation circuit and test system including the same

A test system comprising:

• a probe card that is configured to electrically connect to a plurality of devices under test (DUTs);
• and
• an automatic test equipment (ATE) that is electrically connected to the plurality of DUTs through the probe card, wherein the ATE is configured to test the plurality of DUTs,
• wherein the probe card comprises:
• a plurality of power lines that are electrically connected to the plurality of DUTs;
• a plurality of ground lines that are electrically connected to the plurality of DUTs and to each other;
• and
• a plurality of power compensation circuits that are electrically connected to respective ones of the plurality of power lines and respective ones of the plurality of ground lines,
• wherein the plurality of power compensation circuits are configured to generate and provide a plurality of compensated power supply voltages to the respective ones of the plurality of power lines, and
• wherein the plurality of compensated power supply voltages are configured to inhibit a variation of a ground voltage of respective ones of the plurality of ground lines.

A probe card for testing a plurality of devices under test (DUTs), the probe card comprising:

• a plurality of probes;
• a plurality of power lines that are electrically connected to respective ones of the plurality of DUTs by respective ones of the plurality of probes;
• a plurality of ground lines that are electrically connected to each other and the respective ones of the plurality of DUTs by the respective ones of the plurality of probes;
• and
• a plurality of power compensation circuits that are electrically connected to respective ones of the plurality of power lines and respective ones of the plurality of ground lines,
• wherein the plurality of power compensation circuits configured to generate and provide a plurality of compensated power supply voltages to the respective ones of the plurality of power lines,
• wherein the plurality of compensated power supply voltages are configured to inhibit a variation of a ground voltage of the respective ones of the plurality of ground lines, and
• wherein each of the plurality of power compensation circuits comprises:
• a subtractor that is electrically connected to a respective one of the plurality of power lines and a respective one of the plurality of ground lines, wherein the subtractor is configured to obtain a sensing signal that is based on a voltage difference between a voltage of the respective one of the plurality of power lines and a voltage of the respective one of the plurality of ground lines;
• a linear regulator that is configured to generate a respective one of the plurality of compensated power supply voltages based on the sensing signal such that the voltage difference is fixed, wherein the linear regulator is configured to provide the respective one of the plurality of compensated power supply voltages to the respective one of the plurality of power lines;
• and
• a level setting circuit that is configured to determine an output voltage of the linear regulator.