Test apparatus for semiconductor device and method of manufacturing semiconductor device

A test apparatus for a semiconductor device, the test apparatus comprising:

• a stage capable of holding a semiconductor wafer in which the semiconductor device is formed;
• a probe holder above the stage;
• a plurality of probes each including a tip contactable with the semiconductor device, the plurality of probes being held by the probe holder;
• a plate including a plurality of through holes through which the plurality of probes pass so that the respective tips protrude from the plurality of through holes;
• an enclosed part circumferentially surrounding the plate and the plurality of probes;
• and
• a gas supply part including a gas pipe between the plate and the enclosed part, the gas supply part supplying gas in a direction toward the stage through the gas pipe, and the gas pipe being provided outside of the plate and the enclosed part.

A method of manufacturing a semiconductor device, the method comprising:

• holding, on a stage, a semiconductor wafer in which the semiconductor device is formed;
• bringing, in contact with the semiconductor device, a tip of each of a plurality of probes held by a probe holder located above the stage;
• and
• supplying gas through a gas path, the gas path being provided in a direction toward the stage outside a wind protection wall circumferentially surrounding the plurality of probes,
• wherein each of the plurality of probes includes an inner part closer to a base end than to the tip,
• the inner parts are contained in a wind protection space surrounded by the wind protection wall, and
• the wind protection wall isolates the wind protection space from the gas path.