Vertical probe card
AssigneePoint Engineering Co., Ltd.
InventorsBum Mo Ahn, Seung Ho Park, Sung Hyun Byun
Life of this patent
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Abstract
Proposed is a vertical probe card capable of effectively testing the electrical characteristics of a test object without a body thereof being elastically bent or curved in a convex shape in the horizontal direction by pressure applied to opposite ends thereof.
Claims11
A vertical probe card that is used in a test process of testing a chip manufactured on a wafer during a semiconductor manufacturing process and is capable of coping with a narrower pitch, the vertical probe card comprising:
- a space transformer having a connection pad;
- a guide plate provided under the space transformer so as to be spaced apart from the space transformer;
- and
- a probe pin inserted and installed into a hole of the guide plate,
- wherein the probe pin comprises:
- a first plunger located at an upper portion thereof and configured to be connected to the connection pad of the space transformer;
- a second plunger located at a lower portion thereof and configured to be connected to the chip;
- and
- an elastic portion configured to elastically displace the first plunger and the second plunger in a length direction of the probe pin,
- wherein the elastic portion has a uniform cross-sectional shape in a thickness direction of the probe pin, and
- the elastic portion has a uniform thickness in a width direction and the length direction of the probe pin,
- wherein the elastic portion is formed by repeatedly bending a plate, and an actual width of the plate and a thickness of the plate have a ratio in a range of 1:5 to 1:30.
A vertical probe card that is used in a test process of testing a chip manufactured on a wafer during a semiconductor manufacturing process and is capable of coping with a narrower pitch, the vertical probe card comprising:
- a space transformer having a connection pad;
- a guide plate provided under the space transformer so as to be spaced apart from the space transformer;
- and
- a probe pin inserted and installed into a hole of the guide plate,
- wherein the probe pin comprises:
- a first plunger located at an upper portion thereof and configured to be connected to the connection pad of the space transformer;
- a second plunger located at a lower portion thereof and configured to be connected to the chip;
- and
- an elastic portion configured to elastically displace the first plunger and the second plunger in a length direction of the probe pin,
- wherein the elastic portion has a uniform cross-sectional shape in a thickness direction of the probe pin, and
- the elastic portion has a uniform thickness in a width direction and the length direction of the probe pin,
- wherein a plurality of fine trenches are formed in a side surface of the probe pin in a corrugated shape in which peaks and valleys with a depth in a range of 20 nm to 1 μm are repeated along the side surface of the probe pin in a direction orthogonal to the thickness direction of the probe pin.
Dependencies are inferred from the claim text.