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US 12,618,825 B2Granted
Biological sensing system having micro-electrode array
AssigneePurdue Research Foundation
InventorsHossein Pajouhi, Saeed Mohammadi, Mojgan Sarmadi
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Abstract
A biological sensing system, comprising a microelectrode array having a plurality of islands that are thermally isolated from each other and are interconnected by flexible nano-scale wires. An embedded complementary metal oxide semiconductor (CMOS) instrumentation amplifier and wireless communication circuitry may be operatively connected to the microelectrode array and embedded within input/output pads connected to the wires at the periphery of the array.
Claims4
A method of forming a biological sensing system, comprising:
- providing a CMOS chip, the chip comprising an array of first metal regions in a top layer of the chip and a plurality of second metal regions, the second metal regions having a meandering shape interconnecting areas below the first metal regions;
- applying an anisotropic dry etching using Inductively Coupled Plasma (ICP), wherein the first metal regions provide masking to form an array of islands in the chip;
- depositing a metal oxide layer on sidewalls of the islands to form a protective barrier;
- further etching regions between the islands to form an etched region under the interior islands of the array, leaving only the second metal regions mechanically interconnecting the interior islands.
1 more element
Dependencies are inferred from the claim text.