Gas sensor

Abstract

A gas sensor includes a base member, a first insulating film, a second insulating film, a heater section, a flat section, and a gas detection section. The base member is provided with a cavity. The first insulating film includes beam portions connected to a peripheral portion of the cavity of the base member and a first-insulating-film membrane portion held over the cavity by the beam portions. The second insulating film is laminated on an upper side of the first insulating film. The heater section is provided on an upper side of the first-insulating-film membrane portion. The flat section is provided between the first-insulating-film membrane portion and the second insulating film and disposed closer to a center of the first-insulating-film membrane portion than the heater section and forms a flat surface. The gas detection section is disposed on at least the second insulating film over the flat section.

Dependencies are inferred from the claim text.