Rapid active vibration reduction method for high-speed motion stage

A rapid active vibration reduction method for a high-speed motion stage, comprising the following steps of:

• S1:
• acquiring motion parameters of a motion body of the motion stage in current motion, and determining a vibration reduction mode of a vibration reduction device according to the motion parameters;
• wherein the motion parameters comprise a speed, an accelerated speed and a displacement of the motion body;
• the vibration reduction mode determines a magnitude of output displacement, a magnitude of force and a moment of vibration reduction output of the vibration reduction device;
• and a response time of the vibration reduction device to a signal of a control device is T1, a reaction time of the vibration reduction device after receiving the signal of the control device is T2, a maximum acting time of the vibration reduction device is T3, an error prevention time is T4, and a time from a beginning of motion of the motion body to a moment when inertial vibration is generated by deceleration and positioning to be performed on the motion body is Tp, and when T1+T2+T3+T4<Tp, the time is the moment of vibration reduction output of the vibration reduction device;
• and
• S2:
• controlling an action end of the vibration reduction device to contact with the motion body of the motion stage or contact with a driving device for driving the motion body to move based on the vibration reduction mode during a vibration reduction phase, so that a contact friction force used for suppressing vibration of the motion body is generated;
• wherein the vibration reduction device is arranged outside the motion body, the action end of the vibration reduction device is telescopically controlled, and the action end does not contact with the motion body or does not contact with the driving device when the motion body is in a high-speed motion phase prior to the vibration reduction phase.