Large diameter silicon carbide single crystals and apparatus and method of manufacture thereof
AssigneeII-Vi Advanced Materials, LLC
InventorsXueping Xu, Iiya Zwieback, Avinash Gupta, Varatharajan Rengarajan
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AssigneeII-Vi Advanced Materials, LLC
InventorsXueping Xu, Iiya Zwieback, Avinash Gupta, Varatharajan Rengarajan
Estimating the term…
In an apparatus and method growing a SiC single crystal, a PVT growth apparatus is provided with a single crystal SiC seed and a SiC source material positioned in spaced relation in a growth crucible. A resistance heater heats the growth crucible such that the SiC source material sublimates and is transported via a temperature gradient that forms in the growth crucible in response to the heater heating the growth crucible to the single crystal SiC seed where the sublimated SiC source material condenses forming a growing SiC single crystal. Purely axial heat fluxes passing through the bottom and the top of the growth crucible form a flat isotherm at least at a growth interface of the growing SiC single crystal on the single crystal SiC seed.
A Physical Vapor Transport (PVT) growth apparatus for PVT growing a SiC single crystal comprising:
A PVT growth apparatus for PVT growing a SiC single crystal comprising:
Dependencies are inferred from the claim text.