Vacuum coating apparatus for uniformly distributing metal vapor using uniform mixing buffer structure

Vacuum coating apparatus for uniformly distributing a metal steam using a uniform mixing buffer structure, comprising a crucible, wherein an induction heater for heating a molten metal in the crucible to form the metal steam is arranged outside the crucible;

• a top of the crucible is connected to a flow distribution tank body by a metal steam pipeline;
• a uniform mixing groove and a pressure stabilizing plate, which extend in a horizontal direction, are arranged inside the flow distribution tank body;
• the uniform mixing groove is located below the pressure stabilizing plate;
• a coating nozzle is arranged on top of the flow distribution tank body;
• an induction coil is arranged outside the flow distribution tank body;
• a pressure regulating valve is arranged on the metal steam pipeline;
• the uniform mixing groove is provided in a shape of a circular arc plate, and has a concave arc surface facing the metal steam pipeline;
• one or more heating holes extending in an axial direction of the uniform mixing groove are formed in the uniform mixing groove;
• a resistance wire is arranged inside each heating hole, the uniform mixing groove is provided with an overflow hole, and the overflow hole penetrates through the uniform mixing groove in a radial direction of the uniform mixing groove;
• and
• a buffer groove is formed in an inner wall of the flow distribution tank body, corresponds to the uniform mixing groove in position, and is provided with a plurality of deceleration walls therein.