Imprint device, imprint method, and method for manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorNaoki Murasato
Life of this patent
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Abstract
An imprint apparatus performing imprint processing for molding an imprint material on a substrate using a mold includes a shape correction mechanism configured to correct a shape of the mold using a plurality of contact portions for applying a force to side surfaces of the mold, a detection unit configured to detect contact states of the plurality of contact portions, and a control unit configured to perform a stabilizing operation of moving the mold toward a stable position by adjusting drive timings of the plurality of contact portions in accordance with an output of the detection unit.
Claims11
An imprint apparatus performing imprint processing for molding an imprint material on a substrate using a mold, the imprint apparatus comprising:
- a shape correction mechanism configured to correct a shape of the mold using a plurality of contact portions for applying forces to side surfaces of the mold;
- and
- at least one processor or circuit configured to function as:
- a detection unit configured to detect contact states of the plurality of contact portions by measuring positional deviation of the mold resulting from the contact portions contacting the side surfaces of the mold, using one or more mold sensors that measure a movement of the side surfaces of the mold;
- and
- a control unit configured to perform a stabilizing operation of moving the mold toward a stable position by adjusting drive timings of the plurality of contact portions, based on the measured positional deviation, in accordance with an output of the detection unit,
- wherein the adjusting of the drive timings includes advancing or delaying contact timing of respective contact portions in accordance with a direction of the positional deviation to reduce movement of the mold in each direction.
An imprint method for performing imprint processing for molding an imprint material on a substrate using a mold, the imprint method comprising:
- correcting a mold shape using a plurality of contact portions for applying a force to side surfaces of the mold;
- detecting contact states of the plurality of contact portions by measuring positional deviation of the mold resulting from the contact portions contacting the side surfaces of the mold, using one or more mold sensors that measure a movement of the side surfaces of the mold;
- and
- performing a stabilizing operation of moving the mold toward a stable position by adjusting drive timings of the plurality of contact portions, based on the measured positional deviation, in accordance with an output of the detection,
- wherein the adjusting of the drive timings includes advancing or delaying contact timing of respective contact portions in accordance with a direction of the positional deviation to reduce movement of the mold in each direction.
A method for manufacturing an article using an imprint method for performing imprint processing for molding an imprint material on a substrate using a mold,
- wherein the imprint method includes:
- correcting a mold shape using a plurality of contact portions for applying a force to side surfaces of the mold;
- detecting contact states of the plurality of contact portions by measuring positional deviation of the mold resulting from the contact portions contacting the side surfaces of the mold, using one or more mold sensors that measure a movement of the side surfaces of the mold;
- and
- performing a stabilizing operation of moving the mold toward a stable position by adjusting drive timings of the plurality of contact portions, based on the measured positional deviation, in accordance with an output of the detection,
- wherein the adjusting of the drive timings includes advancing or delaying contact timing of respective contact portions in accordance with a direction of the positional deviation to reduce movement of the mold in each direction, and
- wherein the method for manufacturing the article comprises:
- forming a pattern on the substrate using the imprint method;
- and
- processing the substrate having the pattern formed thereon in the forming.
Dependencies are inferred from the claim text.