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US 12,616,994 B2Granted
Apparatus for preventing blockage of floating stage, substrate processing apparatus and substrate processing method
AssigneeSemes Co., Ltd.
InventorBong Moon Lee
Life of this patent
Estimating the term…
Abstract
An apparatus for preventing blockage of a floating stage includes a moving member moving between a floating stage for lifting a substrate and a nozzle disposed above the floating stage, and a cover installed on the moving member and moving between the floating stage and the nozzle by the moving member to cover the floating stage.
Claims16
An apparatus for preventing blockage of a floating stage, comprising:
- a moving member reciprocating toward a floating stage for lifting a substrate;
- and
- a cover installed on the moving member and moved toward the floating stage by the moving member to cover the floating stage;
- and
- a substrate detection sensor installed on a nozzle support in which a nozzle is installed, and detecting the substrate below the nozzle,
- wherein the moving member is a movable body installed on rails disposed on both sides of the floating stage, and
- the movable body is electrically connected to the substrate detection sensor and a controller and moves between the floating stage and the nozzle when the substrate detection sensor detects an absence of the substrate below the nozzle.
4 more elements
An apparatus for preventing blockage of a floating stage, comprising:
- a moving member reciprocating toward a floating stage for lifting a substrate;
- a cover installed on the moving member and moved toward the floating stage by the moving member to cover the floating stage;
- and
- a substrate detection sensor installed on a nozzle support in which a nozzle is installed, and detecting the substrate below the nozzle,
- wherein the moving member is a rotating body installed on the nozzle support, and
- the rotating body is electrically connected to the substrate detection sensor by a controller, and rotates between the floating stage and the nozzle when the substrate detection sensor detects an absence of the substrate below the nozzle.
3 more elements
A substrate processing apparatus comprising:
- a rail disposed on both sides of a floating stage lifting a substrate in a longitudinal direction of the floating stage;
- a moving member disposed on the rail, moving along the rail, and holding and transporting the substrate;
- a cover installed on the moving member, moved toward the floating stage by the moving member and covering the floating stage;
- and
- a nozzle disposed above the floating stage and processing the substrate by applying a liquid chemical to the substrate moved toward the floating stage;
- and
- a cleaning unit disposed above the floating stage and cleaning the cover.
4 more elements
Dependencies are inferred from the claim text.