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US 12,616,943 B2Granted
Ultrathin membranes for nanoscale pores and channels
AssigneeIllumina, Inc.
InventorsRajesh Kumar Sharma, Gerald Kreindl, Anthony Flannery
Life of this patent
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Abstract
A nanopore sensing system includes a cis well, a trans well, and a metal based membrane positioned between the cis and trans wells so that a channel defined in the metal based membrane fluidically connects the cis and trans wells. The metal based membrane has a thickness ranging from about 1 nm to about 3 nm and is selected from the group consisting of a metal oxide, a metal sulfide, a metal nitride, a metal phosphide, a metal arsenide, a metal antimonide, a metal selenide, and a metal telluride.
Claims5
A method, comprising:
- forming a liquid metal droplet on a temporary substrate;
- in a controlled environment, exposing the liquid metal droplet to oxygen gas or hydrogen sulfide or ammonia, thereby at least partially oxidizing or sulfurizing or nitriding the liquid metal droplet;
- and
- transferring at least a portion of the oxidized liquid metal droplet or the sulfurized liquid metal droplet or the nitridized liquid metal droplet to an other substrate to form a metal oxide or metal sulfide or metal nitride membrane having a thickness ranging from about 1 nm to about 3 nm on the other substrate.
1 more element
Dependencies are inferred from the claim text.