Interconnect substrate and method of making
AssigneeDeca Technologies USA, Inc.
InventorsPaul R. Hoffman, Timothy L. Olson, Craig Bishop, Robin Davis
Life of this patent
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Abstract
A method of making an interconnect substrate, comprising disposing an embedded component and at least one tracking identifier in a substrate core, and planarizing the substrate core to form a planar surface, forming a conductive layer over a frontside planar surface, disposing a layer of dielectric over the frontside planar surface, the embedded component, and the conductive layer, rotating the substrate core such that a back surface of the substrate core is configured for processing, and forming a conductive layer over the back surface of the substrate core.
Claims30
A method of making an interconnect substrate, comprising:
- disposing at least one embedded component in a substrate core, wherein:
- the substrate core comprises one or more of:
- a dielectric, encapsulant, ceramic, glass, polymer, mold compound such as epoxy or a thermoset material, at least one tracking identifier, a printed circuit board (PCB) with or without routing, a PCB core, and silicon, and combinations thereof, and
- the at least one embedded component comprising one or more of:
- a semiconductor chip or semiconductor device, a chiplet, an active device or active component, an integrated circuit (IC), a passive device, an integrated passive device (IPD), a deep trench capacitor (DTC), a transformer, a voltage regulator, power management IC (PMIC), a filter, a switch, an amplifier, an interface, a repeater or retimer, a clock, a processor, a controller, an accelerator, a memory, a non-volatile memory (NVM), a cache, a bridge die, and a buffer;
- planarizing a front surface of the substrate core to form a base frontside planar surface and expose at least a portion of the at least one embedded component;
- forming a first frontside conductive layer over the base frontside planar surface, the first frontside conductive layer comprising one or more of traces, vias, lands, lines, pads, and planes configured for coupling to the at least one embedded component;
- disposing a first frontside layer of dielectric over the frontside planar surface, the at least one embedded component, and the first frontside conductive layer;
- rotating the substrate core with the first frontside layer of dielectric unplanarized such that a back surface of the substrate core is configured for processing;
- forming a first backside conductive layer comprising one or more of traces, vias, lands, lines, pads, and planes over the back surface of the substrate core;
- disposing a first backside layer of dielectric over the back surface of the substrate core and over the first backside conductive layer;
- rotating the substrate core with the first backside layer of dielectric unplanarized such that the first frontside layer of dielectric is configured for processing;
- and
- planarizing the first frontside layer of dielectric to expose at least a portion of the first frontside conductive layer to form a first frontside planar surface on the first frontside layer of dielectric.
A method of making an interconnect substrate, comprising:
- forming a first frontside conductive layer over a front side of a substrate core, wherein the front side is planarized by grinding, chemical mechanical polishing (CMP), surface planarization, polishing, plasma etching, wet etching, or thinning by using a diamond-based cutter, and the substrate core comprises one or more of a dielectric, encapsulant, a resin, polymer, a printed circuit board (PCB), a PCB core, mold compound such as epoxy or a thermoset material;
- disposing a first frontside layer of dielectric over the front side of the substrate core and over the first frontside conductive layer;
- marking a surface of the first frontside layer of dielectric with at least one tracking identifier comprising one or more of a laser mark, an ink mark, a 2D code, a data matrix code, an ecc200 code or a QR code;
- rotating the substrate core such that a back side of the substrate core is configured for processing;
- and
- forming a first backside conductive layer over the back side of the substrate core.
Dependencies are inferred from the claim text.