Calibration of an aligner station of a processing system

A system, comprising:

• one or more robot arms;
• one or more processing chambers;
• an aligner station;
• and
• a controller operatively connected to the one or more robot arms and the aligner station, wherein the controller is to:
• cause the one or more robot arms to transfer a calibration ring from a processing chamber of the one or more processing chambers to the aligner station, the calibration ring having a first processing chamber orientation in the processing chamber and a second orientation at the aligner station;
• determine a first characteristic error value associated with a transfer path between the processing chamber and the aligner station based on the first processing chamber orientation and the second orientation of the calibration ring at the aligner station;
• and
• responsive to detecting, at the aligner station, an object to be transferred to the processing chamber along the transfer path, cause the aligner station to align the object to be placed in the processing chamber according to a target processing chamber orientation based on a target aligner orientation as adjusted by the first characteristic error value determined for the transfer path between the processing chamber and the aligner station.

A non-transitory computer readable storage medium comprising instructions for a server that, when executed by a processing device, cause the processing device to:

• cause one or more robot arms to transfer a calibration ring from a processing chamber to an aligner station, the calibration ring having a first processing chamber orientation in the processing chamber and a second orientation at the aligner station;
• determine a first characteristic error value associated with a transfer path between the processing chamber and the aligner station based on the first processing chamber orientation and the second orientation of the calibration ring at the aligner station;
• and
• responsive to detecting, at the aligner station, an object to be transferred to the processing chamber along the transfer path, cause the aligner station to align the object to be placed in the processing chamber according to a target processing chamber orientation based on a target aligner orientation as adjusted by the first characteristic error value determined for the transfer path between the processing chamber and the aligner station.