Wet-processing dark laboratory for scientific research

A wet-processing dark laboratory for scientific research, comprising a laboratory body, a wet-processing equipment, a transfer robot, a sample supplying and storing apparatus, a chemical supplying and storing apparatus, and a control apparatus:

• wherein:
• the laboratory body is configured to provide a clean space;
• the wet-processing equipment is arranged in the clean space for processing a semiconductor sample;
• the sample supplying and storing apparatus is arranged in the clean space for providing a semiconductor sample to be processed and storing a processed semiconductor sample;
• the chemical supplying and storing apparatus is arranged in the clean space for providing a chemical tank to be replaced and storing a replaced chemical tank;
• the transfer robot is installed in the clean space for transferring the semiconductor sample between the wet-processing equipment, the transfer robot, the sample supplying and storing apparatus, and for transferring the chemical tank between the wet-processing equipment, the transfer robot, and the chemical supplying and storing apparatus;
• the transfer robot comprises a moving device, a mechanical arm device, at least one end effector, and an accompanying device;
• the accompanying device is capable of moving with the moving device and provides a temporary storage space;
• the mechanical arm device is mounted on the moving device;
• the at least one end effector is mounted on the mechanical arm device for grasping the semiconductor sample and the chemical tank;
• the control apparatus is communicatively connected with the wet-processing equipment, the transfer robot, the sample supplying and storing apparatus, and the chemical supplying and storing apparatus;
• the accompanying device is detachably connected with the moving device;
• the wet-processing dark laboratory for scientific research further comprises an accompanying fixing frame for fixing the accompanying device;
• the transfer robot further comprises a forking device;
• the forking device is mounted on the moving device for forking the accompanying device positioned on the accompanying fixing frame;
• the forking device comprises a forking lifting device and a forking plate;
• and
• a driving end of the forking lifting device is connected to the forking plate for driving the forking plate to move up and down, so as to fork the accompanying device off from the accompanying fixing frame or fork the accompanying device back to the accompanying fixing frame;
• wherein the accompanying device is internally provided with an accommodating cavity for forming the temporary storage space;
• and
• the accompanying device is provided with an accompanying door opening and closing mechanism for controlling opening and closing of the accommodating cavity;
• wherein a first interfacing structure is provided at the bottom of the accompanying device;
• the first interfacing structure is provided with a first conductive structure electrically connected with the accompanying door opening and closing mechanism;
• the moving device is provided with a second interfacing structure which is capable of being interfaced and matched with the first interfacing structure;
• the second interfacing structure is provided with a second conductive structure which is capable of contacting the first conductive structure for conducting electricity;
• and
• the transfer robot is further configured to supply power to the accompanying door opening and closing mechanism in response to the first conductive structure being in contact with the second conductive structure for conducting electricity.