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US 12,615,918 B2Granted
Display device and method of fabricating the same
AssigneesTaiwan Semiconductor Manufacturing Company, Ltd., Tsmc China Company Limited
InventorsShui-Liang Chen, Lin-Chun Gui, Jian Huang, Lin-Lin Tian
Life of this patent
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Abstract
An organic light emitting diode display includes an integrated circuit, a first electrode, a spacer, an organic material stack layer, and a second electrode. The first electrode is electrically connected to the integrated circuit and has a top surface, a bottom surface, and an inclined surface connecting the top and bottom surfaces. An angle between the inclined surface and the bottom surface is in a range from about 45 degrees to about 80 degrees. The spacer is disposed to cover the inclined surface of the first electrode. The organic material stack layer is disposed on the first electrode. The second electrode is disposed on the organic material stack layer and the spacers.
Claims20
A method for fabricating an organic light emitting diode display device, comprising:
- forming an electrode layer on an insulation layer, wherein the electrode layer is electrically connected to an integrated circuit through a via plug in the insulation layer;
- etching the electrode layer to obtain a first electrode, wherein the etching of the electrode layer is a dry etching using at least boron chloride (BCl3) as an etchant gas, and the dry etching is performed such that the first electrode has a top surface, a bottom surface, and an inclined surface connecting the top surface and the bottom surface;
- forming a spacer layer covering the inclined surface of the first electrode, wherein the spacer layer overlaps a first partial region of the top surface of the first electrode and non-overlaps a second partial region of the top surface of the first electrode;
- forming an organic material stack layer on the first electrode;
- forming a second electrode on the organic material stack layer and the spacer layer, wherein the spacer layer has a horizontal surface in direct contact with the second electrode to form an interface, wherein the interface formed by the direct contact between the second electrode and the horizontal surface of the spacer layer has a portion at a lower level than the top surface of the first electrode;
- and
- forming a blocking layer over the first electrode prior to forming the spacer layer, wherein after forming the spacer layer, the blocking layer has a stepped top surface comprising a lower step, an upper step higher than the lower step, and a step rise extending upwards from the lower step to the upper step, wherein the lower step of the stepped top surface of the blocking layer overlaps with an entirety of the organic material stack layer.
4 more elements
A method for fabricating an organic light emitting diode display device, comprising:
- forming a dielectric layer over an integrated circuit and a via plug in the dielectric layer;
- depositing a bottom electrode material over the via plug, and a top diffusion blocking material over the bottom electrode material;
- patterning the bottom electrode material into a bottom electrode and patterning the top diffusion blocking material into a top diffusion blocking layer, the bottom electrode having a lateral dimension increasing from a top surface of the bottom electrode to a bottom surface of the bottom electrode;
- forming a spacer layer over the bottom electrode;
- etching the spacer layer to form an opening in the spacer layer, wherein the spacer layer overlaps the top surface of the bottom electrode after etching the spacer layer, wherein after etching the spacer layer to form the opening in the spacer layer, the top diffusion blocking layer has a stepped top surface comprising a lower step, an upper step higher than the lower step, and a step rise extending upwards from the lower step to the upper step;
- forming an organic material stack in the opening, wherein the organic material stack non-overlaps with the upper step of the stepped top surface of the top diffusion blocking layer;
- and
- forming a top electrode over the organic material stack and the spacer layer, wherein the top electrode is in direct contact with a horizontal surface of the spacer layer to form a horizontal interface with the horizontal surface of the spacer layer, and the horizontal interface has a portion at a lower level than the top surface of the bottom electrode.
5 more elements
A method for fabricating an organic light emitting diode display device, comprising:
- forming an inter-metal dielectric (IMD) layer over a substrate;
- forming a metal via in the IMD layer;
- forming in sequence a bottom diffusion blocking material, a bottom electrode material, and a top diffusion blocking material over the metal via;
- patterning the top diffusion blocking material into a top diffusion blocking layer;
- patterning the bottom electrode material into a bottom electrode having a trapezoidal cross-section;
- patterning the bottom diffusion blocking material into a bottom diffusion blocking layer;
- forming a patterned spacer layer overlapping a partial region of a top surface of the top diffusion blocking layer, wherein after forming the patterned spacer layer, the top diffusion blocking layer has a stepped top surface comprising a lower step, an upper step higher than the lower step, and a step rise extending upwards from the lower step to the upper step;
- forming an organic material stack in the patterned spacer layer, wherein the lower step of the stepped top surface of the top diffusion blocking layer is in contact with an entire bottom surface of the organic material stack;
- and
- forming a top electrode over the organic material stack, wherein the patterned spacer layer is a single-layered film in contact with both the top electrode and the bottom electrode, wherein the patterned spacer layer has a horizontal surface in direct contact with a horizontal surface of the top electrode to form a horizontal interface, wherein the horizontal interface formed by the direct contact between the top electrode and the patterned spacer layer has a portion at a lower level than a top surface of the bottom electrode.
7 more elements
Dependencies are inferred from the claim text.