Stacked field-effect transistors
AssigneeInternational Business Machines Corporation
InventorsRuilong Xie, Su Chen Fan, Julien Frougier, Maruf Amin Bhuiyan, Pouya Hashemi, Takashi Ando, Alexander Reznicek
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AssigneeInternational Business Machines Corporation
InventorsRuilong Xie, Su Chen Fan, Julien Frougier, Maruf Amin Bhuiyan, Pouya Hashemi, Takashi Ando, Alexander Reznicek
Estimating the term…
Provided is a stacked field-effect transistor (FET). The stacked FET comprises a top active region. The width of the top of the top active region is smaller than the width of bottom of the top active region. The stacked FET further comprises a top contact in direct contact with a top surface of the top active region. The stacked FET further comprises a bottom active region located substantially below the top active region. The stacked FET further comprises a bottom contact in direct contact with a top surface of the bottom active region. The bottom contact is wider at a top end than at a bottom end.
A stacked field-effect transistor (FET) comprising:
A stacked field-effect transistor (FET) comprising:
Dependencies are inferred from the claim text.