Three-dimensional nor memory string arrays of thin-film ferroelectric transistors
AssigneeSunrise Memory Corporation
InventorsChristopher J. Petti, Eli Harari
Life of this patent
Estimating the term…
Loading patent…
AssigneeSunrise Memory Corporation
InventorsChristopher J. Petti, Eli Harari
Estimating the term…
A memory structure includes storage transistors organized as horizontal NOR memory strings where the storage transistors are thin-film ferroelectric field-effect transistors (FeFETs) having a ferroelectric gate dielectric layer formed adjacent a semiconductor channel. In some embodiments, the semiconductor channel is formed by an oxide semiconductor material and the ferroelectric storage transistors are junctionless transistors with no p/n junction in the channel. In some embodiments, the ferroelectric storage transistors in each NOR memory string share a first conductive layer as a common source line and a second conductive layer as a common bit line, the first and second conductive layers being in electrical contact with the semiconductor channel. The ferroelectric storage transistors in a multiplicity of NOR memory strings are arranged to form semi-autonomous three-dimensional memory arrays (tiles) with each tile individually addressed and controlled by circuitry in the semiconductor substrate underneath each tile in cooperation with a memory controller.
A three dimensional memory structure formed above a planar surface of a semiconductor substrate, the memory structure comprising:
A three dimensional memory structure formed above a planar surface of a semiconductor substrate, the memory structure comprising:
Dependencies are inferred from the claim text.