3D DRAM memory
AssigneeChangxin Memory Technologies, Inc.
InventorShuai Guo
Life of this patent
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AssigneeChangxin Memory Technologies, Inc.
InventorShuai Guo
Estimating the term…
Embodiments of the present disclosure provide a semiconductor structure and a manufacturing method thereof, including: a first base, the first base includes a bit line, a transistor, and a first contact structure that are stacked; and a second base, bonded with the first base, the second base includes a second contact structure and a capacitor that are stacked, and the second contact structure is in contact with the first contact structure in an aligned manner; the first contact structure has a first surface facing the second base and a second surface opposite to the first surface, and an area of the first surface is larger than an area of the second surface; and the second contact structure has a third surface facing the first base and a fourth surface opposite to the third surface, and an area of the third surface is larger than an area of the fourth surface.
A semiconductor structure, comprising:
Dependencies are inferred from the claim text.