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US 12,615,759 B2Granted
Semiconductor structure and method for forming the same with multiple gate conductive layers having different characteristics
AssigneeCXMT Corporation
InventorsYu-Cheng Liao, Wenjie Liu, Joonsuk Moon
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Abstract
Provided is a semiconductor structure and a formation method therefor. The semiconductor structure includes: a gate structure located on a substrate. The gate structure includes at least two gate conductive layers; the at least two gate conductive layers have the same components and different characteristic parameters; and the characteristic parameter includes at least one of thickness, component content or shape.
Claims18
A semiconductor structure, comprising:
- a gate structure located on a substrate, the gate structure comprising at least two gate conductive layers;
- a first gate dielectric layer and a second gate dielectric layer;
- and
- a first semiconductor layer and a first conductor layer, which are located on a surface of the at least two gate conductive layers;
- wherein the substrate comprises a source and a drain, wherein at least one of the source or the drain comprises:
- a first doped region and a second doped region which is located on a surface of the first doped region,
- wherein a work function of the second gate dielectric layer is less than a work function of the second doped region;
- and
- the at least two gate conductive layers have same components and different characteristic parameters;
- and the characteristic parameters comprise at least one of thickness, component content or shape, wherein components in each of the at least two gate conductive layers comprise a nitrogen component and a metal component, and wherein a concentration of the nitrogen component is different in different gate conductive layers.
7 more elements
Dependencies are inferred from the claim text.