MEMS microphone

A micro-electro-mechanical system (MEMS) microphone, comprising:

• a substrate;
• a supporting plate;
• a capacitor system;
• a first pad;
• a first electrode;
• and
• a conductive component;
• wherein the substrate defines a back cavity, the supporting plate is disposed at one side of the substrate and defines an accommodation cavity, and the capacitor system is disposed at the supporting plate;
• the capacitor system comprises a back plate, a fixing component, and a vibrating diaphragm;
• the back plate is fixed to the supporting plate, the fixing component is fixed to one side of the back plate close to the substrate, the vibrating diaphragm is fixed to one side of the fixing component distal from the back plate and is accommodated in the accommodation cavity;
• the fixing component is located at a central region of the vibrating diaphragm, and the vibrating diaphragm is disposed opposite to the back plate;
• the first pad is fixed to one side of the supporting plate distal from the substrate, the first electrode is fixedly connected to the central region of the vibrating diaphragm and is electrically connected to the first pad, and the first electrode is only connected to the central region of the vibrating diaphragm,
• the vibrating diaphragm defines a first notch extending from an edge of the vibrating diaphragm to the central region of the vibrating diaphragm, the first notch comprises a bottom wall and two side walls, the bottom wall is disposed opposite to an opening of the notch, and the two side walls are respectively connected to two ends of the bottom wall;
• the first electrode is fixedly connected to the bottom wall, and a gap is defined between the first electrode and the bottom wall, the conductive component penetrates through the back plate, and two ends of the conductive component are respectively and fixedly connected to the first electrode and the first pad;
• the conductive component is connected to one end of the first electrode distal from the bottom wall, and the first electrode is electrically connected to the first pad through the conductive component, one side of the back plate distal from the substrate protrudes from a surface of the one side of the supporting plate distal from the substrate;
• the first pad comprises a main body part, a bent part, and a connecting part;
• the main body part is fixed to the supporting plate, the bent part is connected to the main body part, and the connecting part is connected to one end of the bent part distal from the main body part;
• the conductive component penetrates through the connecting part and is fixed to the connecting part.