Stacked single mirror acoustic wave device and double mirror acoustic wave device
AssigneeSkyworks Solutions, Inc.
InventorsHironori Fukuhara, Rei Goto
Life of this patent
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AssigneeSkyworks Solutions, Inc.
InventorsHironori Fukuhara, Rei Goto
Estimating the term…
An acoustic wave device assembly is disclosed. The acoustic wave device assembly can include a first acoustic wave device that includes a first substrate, a first piezoelectric layer, a first solid acoustic mirror that is disposed between the first substrate and the first piezoelectric layer, and a first interdigital transducer electrode that is in contact with the first piezoelectric layer. The acoustic wave device assembly can include a second acoustic wave device that includes a second substrate, a second piezoelectric layer, a second solid acoustic mirror that is disposed between the second substrate and the second piezoelectric layer, a second interdigital transducer electrode that is in contact with the second piezoelectric layer, and a third solid acoustic mirror over the second interdigital transducer electrode. The first acoustic wave device and the second acoustic wave device being stacked on one another. The acoustic wave device assembly can include a spacer assembly that is disposed over the first piezoelectric layer.
An acoustic wave device assembly comprising:
An acoustic wave device assembly comprising:
Dependencies are inferred from the claim text.