Acoustic wave device and method of manufacturing the same
AssigneeMurata Manufacturing Co., Ltd.
InventorsKazunori Inoue, Takashi Yamane
Life of this patent
Estimating the term…
Abstract
An acoustic wave device includes a support including a support substrate, a piezoelectric layer on the support, and a functional electrode on the piezoelectric layer and including at least one pair of electrodes. The support includes a cavity portion overlapping at least a portion of the functional electrode in plan view. The piezoelectric layer includes a membrane portion overlapping the cavity portion in plan view, and a supported portion supported by the support. A boundary covering electrode is provided on the piezoelectric layer over an entire or substantially an entire portion overlapping a boundary between the membrane portion and the supported portion in plan view.
Claims24
An acoustic wave device, comprising:
- a support including a support substrate;
- a piezoelectric layer on the support;
- and
- a functional electrode on the piezoelectric layer and including at least one pair of electrodes;
- wherein
- the support includes a cavity portion overlapping at least a portion of the functional electrode in plan view;
- the piezoelectric layer includes a membrane portion overlapping the cavity portion in plan view, and a supported portion supported by the support;
- and
- a boundary covering electrode is provided on the piezoelectric layer over an entire portion overlapping a boundary between the membrane portion and the supported portion in plan view.
Dependencies are inferred from the claim text.