Method of making a multilayer piezoelectric substrate for acoustic wave device

A method of manufacturing a surface acoustic wave resonator, the method comprising:

• cutting a support substrate layer to form a first cut angle defined by first, second and third Euler angles (φ2, θ2, ψ2) so that the second Euler angle θ2 has a value of about 25<θ2<70 degrees;
• cutting a piezoelectric layer of lithium niobate to form a second cut angle defined by first, second and third Euler angles (φ1, θ1, ψ1) so that the second Euler angle θ1 has a value of about 76<θ1<86 degrees, and forming the piezoelectric layer over the support substrate layer to have a height H1 with a value of about 0.3L<H1<0.9L, where L is a pitch between a plurality of fingers of an interdigital transducer electrode;
• and
• forming the interdigital transducer electrode including the plurality of fingers over the piezoelectric layer.