Bulk acoustic wave component with circuit element including conductive material buried in dielectric

An acoustic wave filter for filtering a radio frequency signal, the acoustic wave filter comprising:

• a bulk acoustic wave resonator;
• a circuit element electrically connected to the bulk acoustic wave resonator, the circuit element including conductive material buried in a dielectric layer;
• a metal-insulator-metal capacitor including an electrode buried in the dielectric layer;
• and
• a plurality of additional bulk acoustic wave resonators connected to the bulk acoustic wave resonator.

A packaged radio frequency module comprising:

• a filter including a bulk acoustic wave resonator, a circuit element electrically connected to the bulk acoustic wave resonator and including conductive material buried in a dielectric layer, and a metal-insulator-metal capacitor including an electrode buried in the dielectric layer;
• a power amplifier operatively coupled to the filter;
• and
• a packaging structure enclosing the filter and the power amplifier.