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US 12,615,027 B2Granted
Sensor with a resonator positioned at a cavity of a substrate
AssigneeKampanics, L.L.C.
InventorsKushal Kumar Bhattacharjee, Mihir S. Patel
Life of this patent
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Abstract
A sensor that includes a substrate with a first side having a cavity extending into the first side. A resonator is connected to the substrate and extends over the cavity with the resonator including first and second electrodes overlapping on opposing sides of the piezoelectric crystal. The substrate is connected to the resonator such that one or more physical parameters exerted on the substrate are transferred to the resonator.
Claims20
A sensor comprising:
- a resonator comprising:
- a piezoelectric layer;
- a first electrode positioned on a first side of the piezoelectric layer;
- a second electrode positioned on a second side of the piezoelectric layer;
- an active region formed at an overlap of the first and second electrodes on the first and second sides of the piezoelectric layer;
- a supporting substrate that extends across the resonator at the second electrode, the supporting substrate comprising a cavity that is aligned with the resonator;
- an inactive region that surrounds the active region, the inactive region comprising at least the piezoelectric layer and the supporting substrate.
4 more elements
A sensor comprising:
- a resonator comprising a piezoelectric layer positioned between opposing electrodes and comprising an active region at an overlap of the electrodes and the piezoelectric layer and an inactive region that surrounds the active region and comprises at least the piezoelectric layer and a supporting substrate;
- the supporting substrate positioned to extend across the resonator and comprising a cavity that is aligned with the resonator;
- and
- a control unit comprising processing circuitry, the control unit configured to sense one or more physical parameters that are applied to the resonator.
1 more element
A method of sensing a condition of an environment, the method comprising:
- positioning a device within an environment with the device comprising a resonator comprising an active region formed at an overlap of first and second electrodes on first and second sides of a piezoelectric layer, a supporting substrate that extends across the resonator at the second electrode and that has a cavity that is aligned with the resonator, and an inactive region that surrounds the active region;
- and
- sensing one or more physical parameters of the environment with the resonator.
Dependencies are inferred from the claim text.