Plasma monitoring system

A plasma monitoring system, comprising:

• a chamber with an interior space, the chamber being configured to perform a semiconductor process on a semiconductor substrate using plasma in the interior space, and the chamber including an optical window and a substrate stage;
• a light collecting device on the substrate stage, the light collecting device including a body and light collectors, the body having through holes therethrough, each light collector being configured to collect light from the plasma that is incident on a corresponding one of the through holes and to transfer the light onto the optical window;
• and
• a light analyzer configured to obtain an optical spectrum from each light irradiated onto the optical window, and to map a state of the plasma from the optical spectrum to correspond to positions of the through holes,
• wherein each of the light collectors includes:
• a reflection mirror configured to reflect at least a portion of the light incident on the corresponding one of the through holes,
• an optical fiber configured to transmit at least the portion of the light reflected from the reflection mirror, and
• a collimator configured to illuminate at least the portion of the light transmitted from the optical fiber toward the optical window.

A plasma monitoring system, comprising:

• a chamber with an interior space, the chamber being configured to perform a semiconductor process on a semiconductor substrate using plasma in the interior space, and the chamber including an optical window and a substrate stage configured to support the semiconductor substrate;
• a light collecting device on the substrate stage, the light collecting device including a body with through holes, each light collector being configured to collect light incident on a corresponding one of the through holes and to transfer the light onto the optical window, and an alignment fixture at one side of the body that fixes the light collectors in a predetermined arrangement;
• and
• a light analyzer including an optical scanner and a spectrometer, the light analyzer being configured to map a state of the plasma from an optical spectrum to correspond to positions of the through holes, the optical scanner being configured to sequentially scan the light reflected from the light collectors, and the spectrometer being configured to obtain the optical spectrum from the light,
• wherein each of the light collector includes:
• a reflection mirror configured to reflect at least a portion of the light incident on the corresponding one of the through holes,
• an optical fiber configured to transmit at least the portion of the light reflected from the reflection mirror, and
• a collimator configured to illuminate at least the portion of the light transmitted from the optical fiber toward the optical window.