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US 12,614,704 B2Granted
Plasma potential measuring device and measuring method
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorHiroshi Shirouzu
Life of this patent
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Abstract
A plasma potential measuring device, including: a detection electrode 162b which is disposed so as to face a plasma P generated in a chamber and at which an electric charge corresponding to an electric potential of the plasma is induced; a potential changing circuit 203 for changing a reference potential of the detection electrode 162b; and a detection circuit 202 for detecting an amount of electric charge or potential induced at the detection electrode 162b.
Claims5
A plasma potential measuring device, comprising:
- a detection electrode which is disposed so as to face a plasma generated in a chamber and at which an electric charge corresponding to an electric potential of the plasma is induced;
- a potential changing circuit for changing a reference potential of the detection electrode;
- and
- a detection circuit for detecting an amount of electric charge or potential induced at the detection electrode,
- wherein the detection circuit includes an operational amplifier which has an inverting input terminal and a non-inverting input terminal virtually short-circuited with the inverting input terminal, and
- wherein one of the inverting input terminal and the non-inverting input terminal is connected to the detection electrode and another one of the inverting input terminal and the non-inverting input terminal is connected to the potential changing circuit such that the reference potential of the detection electrode is changeable by a voltage applied to the other one of the inverting input terminal and the non-inverting input terminal by the potential changing circuit.
3 more elements
A plasma potential measuring device, comprising:
- a detection electrode which is disposed so as to face a plasma generated in a chamber and at which an electric charge corresponding to an electric potential of the plasma is induced;
- a first electrode facing the detection electrode on an opposite side to the plasma;
- a first insulating member interposed between the detection electrode and the first electrode;
- and
- an operational amplifier which has an output terminal, an inverting input terminal, and a non-inverting input terminal virtually short-circuited with the inverting input terminal,
- wherein
- the non-inverting input terminal is connected to the detection electrode and the inverting input terminal and the output terminal is connected to the first electrode such that the first electrode is virtually short-circuited with the detection electrode via the operational amplifier.
4 more elements
Dependencies are inferred from the claim text.