Substrate processing chamber with plasma confinement
AssigneeApplied Materials, Inc.
InventorsYogananda Vishwanath Sarode, Anand Kumar
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Abstract
A plasma confinement screen system for a process chamber includes an inner plasma screen having an inner annular body with a central opening, the annular body including a plurality of first openings; and an outer plasma screen having an outer annular body with a central opening surrounding the inner plasma screen, the outer annular body including a plurality of second openings, wherein the outer plasma screen is configured for vertical movement relative to the inner plasma screen.
Claims18
A plasma confinement screen system for use in a process chamber, the system comprising:
- an inner plasma screen having an inner annular body with a central opening, the annular body including a plurality of first openings;
- and
- an outer plasma screen having an outer annular body with a central opening surrounding the inner plasma screen, the outer annular body including a plurality of second openings, wherein the outer plasma screen is configured for vertical movement relative to the inner plasma screen,
- wherein the inner plasma screen has an inner mounting flange configured to fix the inner plasma screen to the process chamber.
A process chamber for substrate processing, the process chamber comprising:
- a chamber body defining a substrate processing volume;
- a substrate support positioned in the substrate processing volume, the substrate support configured to support a substrate during plasma processing;
- a process kit surrounding the substrate support;
- and
- a plasma confinement screen system extending from the process kit, the plasma confinement screen system comprising:
- an inner plasma screen having an inner annular body with a central opening, the annular body including a plurality of first openings;
- and
- an outer plasma screen having an outer annular body with a central opening surrounding the inner plasma screen, the outer annular body including a plurality of second openings, wherein the outer plasma screen is configured for vertical movement relative to the inner plasma screen,
- wherein the inner plasma screen is fixed to the substrate support.
Dependencies are inferred from the claim text.