Inspection apparatus, method of manufacturing template, and method of inspecting template

A method of manufacturing a template having a region including a plurality of patterns with different heights from a reference plane in a first direction intersecting the reference plane, the method comprising:

• forming the plurality of patterns on a transparent substrate;
• deciding a plurality of target values regarding a relative distance in the first direction between the reference plane and a lens based on height information regarding the height, the plurality of target values being different from each other;
• capturing a first image including a whole of the region from the first direction, with the relative distance in the first direction between the reference plane and the lens adjusted based on a first target value from among the plurality of target values;
• capturing a second image including the whole of the region from the first direction, while fixing a relative position between the region and the lens in second and third directions to a capturing position of the first image, with the relative distance in the first direction between the reference plane and the lens adjusted based on a second target value from among the plurality of target values, the second target value being different from the first target value, and the second and third directions intersecting each other along the reference plane;
• extracting a first part including a first pattern from the first image including the first pattern and a second pattern, the first pattern and the second pattern being included in the plurality of patterns;
• extracting a second part including the second pattern from the second image including the first pattern and the second pattern, the second pattern being different in height from the first pattern;
• generating a synthetic image including the first part and the second part;
• determining presence or absence of a defect in the transparent substrate from the synthetic image;
• deciding the first target value based on a first height information regarding the first pattern from among the height information in the deciding the plurality of target values;
• and
• deciding the second target value based on second height information regarding the second pattern from among the height information in the deciding the plurality of target values, the second height information showing a different height than a height shown by the first height information.

A method of inspecting a template having a region including a plurality of patterns with different heights from a reference plane in a first direction intersecting the reference plane, the method comprising:

• deciding a plurality of target values regarding a relative distance in the first direction between the reference plane and a lens based on height information regarding the height, the plurality of target values being different from each other;
• capturing a first image including a whole of the region from the first direction, with the relative distance in the first direction between the reference plane and the lens adjusted based on a first target value from among the plurality of target values;
• capturing a second image including the whole of the region from the first direction, while fixing a relative position between the region and the lens in second and third directions to a capturing position of the first image, with the relative distance in the first direction between the reference plane and the lens adjusted based on a second target value among the plurality of target values, the second target value being different from the first target value, and the second and third directions intersecting each other along the reference plane;
• extracting a first part including a first pattern from the first image including the first pattern and a second pattern, the first pattern and the second pattern being included in the plurality of patterns;
• extracting a second part including the second pattern from the second image including the first pattern and the second pattern, the second pattern being different in height from the first pattern;
• generating a synthetic image including the first part and the second part;
• determining presence or absence of a defect in the template from the synthetic image;
• deciding the first target value based on a first height information regarding the first pattern from among the height information in the deciding the plurality of target values;
• and
• deciding the second target value based on a second height information regarding the second pattern from among the height information in the deciding the plurality of target values, the second height information showing a different height from a height shown by the first height information.