System and method for defect mitigation using data analysis

A system, the system comprising:

• one or more controllers including one or more processors configured to execute a set of program instructions stored in memory, the set of program instructions configured to cause the one or more processors to:
• receive defect data from a characterization sub-system, the defect data including one of a defect location, a defect size, a defect shape, or a relationship between a defect and a component of one or more samples;
• identify at least one defect of the one or more defects as a disqualifying defect based on the received defect data and one or more predetermined thresholds;
• upon identifying the defect as a disqualifying defect, generate a tool readable index, the tool readable index configured to cause one or more downstream fabrication tools to adjust one or more downstream fabrication steps corresponding to the disqualifying defect based on the generated index;
• and
• provide the generated tool readable index to a fabrication controller communicatively coupled to the one or more downstream fabrication tools, the fabrication controller configured to generate one or more communication protocols based on the generated tool readable index and to transmit the one or more communication protocols to the one or more downstream fabrication tools to cause the one or more downstream fabrication tools to adjust the one or more downstream fabrication steps corresponding to the disqualifying defect based on the generated tool readable index and the generated one or more communication protocols.

A method, the method comprising:

• receiving defect data for one or more defects of one or more samples from a characterization sub-system, the defect data including one of a defect location, a defect size, a defect shape, or a relationship between the defect and a component of the one or more samples;
• identifying at least one defect of the one or more defects as a disqualifying defect based on the received defect data and one or more predetermined thresholds;
• upon identifying the defect as a disqualifying defect, generating a tool readable index, the generated tool readable index configured to cause one or more downstream fabrications tool to adjust one or more downstream fabrication steps corresponding to the disqualifying defect based on the generated tool readable index;
• and
• providing the generated tool readable index to a fabrication controller communicatively coupled to the one or more downstream fabrication tools, the fabrication controller configured to generate one or more communication protocols based on the generated tool readable index and to transmit the one or more communication protocols to the one or more downstream fabrication tools to cause the one or more downstream fabrication tools to adjust the one or more downstream fabrication steps corresponding to the disqualifying defect based on the generated tool readable index and the generated one or more communication protocols.