Photosensitive resin composition and method for producing cured relief pattern
AssigneeAsahi Kasei Kabushiki Kaisha
InventorsTomohiro Yorisue, Mitsutaka Nakamura, Taihei Inoue
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AssigneeAsahi Kasei Kabushiki Kaisha
InventorsTomohiro Yorisue, Mitsutaka Nakamura, Taihei Inoue
Estimating the term…
A negative-type photosensitive resin composition that has a satisfactory imidization rate and can yield a resin layer with high chemical resistance, even under low-temperature curing conditions of 200° C. or below, the negative-type photosensitive resin composition containing a photopolymerization initiator (B) in a proportion of 0.1 part by mass to 20 parts by mass with respect to 100 parts by mass of a polyimide precursor (A), the polyimide precursor (A) being a polyamic acid ester or polyamic acid salt with a specific structure, and the weight-average molecular weight (Mw) of the polyimide precursor (A) being 3,000 or greater and less than 16,000, in terms of polystyrene, according to gel permeation chromatography (GPC).
A negative-type photosensitive resin composition comprising:
Dependencies are inferred from the claim text.