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US 12,613,381 B2Granted
Metamaterial layers for use with optical components
AssigneeGlobalFoundries U.S. Inc.
InventorYusheng Bian
Life of this patent
Estimating the term…
Abstract
Structures including an optical component, such as an edge coupler, and methods of fabricating such structures. The structure includes a substrate, a waveguide core over the substrate, and a metamaterial layer positioned in a vertical direction between the waveguide core and the substrate. The metamaterial layer includes a set of elements separated by a set of gaps and a dielectric material in the set of gaps.
Claims19
A structure comprising:
- a silicon-on-insulator substrate including a buried oxide layer and a semiconductor substrate;
- a first waveguide core over the buried oxide layer;
- and
- a metamaterial layer positioned in a vertical direction between the first waveguide core and the semiconductor substrate, the metamaterial layer including a plurality of elements separated by a plurality of gaps and a first dielectric material in the plurality of gaps,
- wherein the first waveguide core comprises a second dielectric material different from the first dielectric material, the plurality of elements are positioned in a one-dimensional array, the first waveguide core has a first longitudinal axis, each of the plurality of elements is elongated with alignment along a second longitudinal axis, and the second longitudinal axis is aligned parallel to the first longitudinal axis.
2 more elements
A method comprising:
- forming a waveguide core over a buried oxide layer of a semiconductor-on-insulator substrate;
- and
- forming a metamaterial layer positioned in a vertical direction between the waveguide core and a semiconductor substrate of the semiconductor-on-insulator substrate,
- wherein the metamaterial layer includes a plurality of elements separated by a plurality of gaps and a first dielectric material in the plurality of gaps, the waveguide core comprises a second dielectric material different from the first dielectric material, the plurality of elements are positioned in a one-dimensional array, the waveguide core has a first longitudinal axis, each of the plurality of elements is elongated with alignment along a second longitudinal axis, and the second longitudinal axis is aligned parallel to the first longitudinal axis.
1 more element
Dependencies are inferred from the claim text.