Fluidic wafer probe
AssigneeTexas Instruments Incorporated
InventorsSebastian Meier, Helmut Bumberger, Heinrich Wachinger
Life of this patent
Estimating the term…
Abstract
A wafer probe test system has a conductive needle configured to contact a conductive feature on a surface of a wafer, and a fluid probe having a multichannel tube, the fluid probe configured to engage the surface of the wafer to form a fluidic seal between a sensor face on the surface of the wafer and the conductive feature of the wafer, the multichannel tube having a first channel and a second channel configured to create a flow of fluid across the sensor face on the surface of the wafer.
Claims16
A wafer probe test system, comprising:
- a conductive needle configured to contact a conductive feature on a surface of a wafer;
- and a fluid probe having a multichannel tube, the fluid probe configured to engage the surface of the wafer to form a fluidic seal between a sensor face on the surface of the wafer and the conductive feature of the wafer, the multichannel tube having a first channel and a second channel configured to create a flow of fluid across the sensor face on the surface of the wafer;
- and a force sensor configured to sense engagement of the fluid probe and the surface of the wafer.
A method of manufacturing an electronic device, the method comprising:
- engaging a conductive feature on a surface of a wafer to a conductive needle;
- engaging a fluid probe to the surface of the wafer to form a fluidic seal between a sensor face on the surface of the wafer and the conductive feature of the wafer;
- sensing engagement of the fluid probe and the surface of the wafer using a force sensor coupled to the fluid probe;
- using a multichannel tube of the fluid probe, creating a flow of fluid across the sensor face on the surface of the wafer;
- and using the conductive needle, performing an electrical test of a sensor circuit of the wafer while the fluid flows across the sensor face on the surface of the wafer.
Dependencies are inferred from the claim text.