Semiconductor device and method of manufacturing semiconductor device
AssigneeMurata Manufacturing Co., Ltd.
InventorsNaruto Miyakawa, Shota Ushiba, Ayumi Shinagawa, Yuka Oka, Masahiko Kimura
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Abstract
A semiconductor device according to the present invention includes a substrate, a plurality of electrodes on the substrate, an insulator provided with one or a plurality of openings exposing at least one electrode among the plurality of electrodes on the substrate, the insulator covering at least a portion of the plurality of electrodes, and a semiconductor sheet on the insulator and one or a plurality of exposed portions exposed from the one or the plurality of openings on the substrate.
Claims20
A semiconductor device comprising;
- a substrate;
- a plurality of electrodes on the substrate;
- an insulator provided over the plurality of electrodes and with one opening or a plurality of openings exposing at least one electrode among the plurality of electrodes on the substrate, the insulator covering at least a portion of the plurality of electrodes;
- and
- a semiconductor sheet over the insulator and covering one or a plurality of exposed portions exposed from the one opening or the plurality of openings on the substrate;
- wherein
- when viewed from the height direction of the substrate, the plurality of electrodes are exposed from the insulator also at portions other than the one opening or the plurality of openings, and an area of the insulator is larger than an area of the plurality of electrodes exposed from the insulator.
A method of manufacturing a semiconductor device comprising:
- preparing a substrate on which a plurality of electrodes are provided;
- forming an insulator over the plurality of electrodes and provided with one or a plurality of openings exposing at least one electrode among the plurality of electrodes on the substrate, the insulator covering the plurality of electrodes;
- and
- forming a semiconductor sheet over the insulator and to cover one or a plurality of exposed portions exposed from the one or the plurality of openings on the substrate;
- wherein
- when viewed from the height direction of the substrate, the plurality of electrodes are exposed from the insulator also at portions other than the one or the plurality of openings, and an area of the insulator is larger than an area of the plurality of electrodes exposed from the insulator.
Dependencies are inferred from the claim text.