Sensor system and gas system
AssigneeKabushiki Kaisha Toshiba
InventorsPing Wang, Hiroaki Yamazaki, Fumitaka Ishibashi, Ryota Kitagawa, Yuki Kudo, Naoya Fujiwara
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Abstract
According to one embodiment, a sensor system includes a pipe and a sensor. The sensor is configured to detect a detection target substance in the pipe. The sensor includes a base, a first detection part, and a second detection part. The base includes a first base region and a second base region. The first detection part includes a first support part, a first connection part, and a first detection element. The second detection art includes a second support part, a second connection part, and a second detection element.
Claims20
A sensor system, comprising:
- a pipe;
- and
- at least one sensor configured to detect a detection target substance in the pipe,
- the at least one sensor including:
- a base,
- a first detection part, and
- a second detection part,
- the base including a first base region and a second base region,
- the first detection part including a first support part, a first connection part, and a first detection element,
- a position of the first detection part with respect to the first base region being fixed,
- the first connection part being supported by the first support part,
- the first connection part supporting the first detection element,
- a first gap being provided between the first base region and the first detection element,
- the first detection part having a first area of the first detection element, a first connection part length of the first connection part, a first connection part width of the first connection part, a first connection part thickness of the first connection part, a first connection part material of the first connection part, and a first distance, the first distance being a distance between the first base region and the first detection element,
- the second detection part including a second support part, a second connection part, and a second detection element,
- a position of the second support part with respect to the second base region being fixed,
- the second connection part being supported by the second support part,
- the second connection part supporting the second detection element,
- a second gap being provided between the second base region and the second detection element, and
- the second detection part having at least one of a second area different from the first area of the second detection element, a second connection part length different from the first connection part length of the second connection part, a second connection part width different from the first connection part width of the second connection part, a second connection part thickness different from the first connection part thickness of the first connection part thickness, a second connection part material different from the first connection part material of the second connection part, or a second distance different from the first distance, the second distance being a distance between the second base region and the second detection element.
Dependencies are inferred from the claim text.