Sensor and sensor system
AssigneeKabushiki Kaisha Toshiba
InventorsYosuke Akimoto, Akira Fujimoto, Yoshihiko Kurui, Ping Wang, Hiroaki Yamazaki
Life of this patent
Estimating the term…
Loading patent…
AssigneeKabushiki Kaisha Toshiba
InventorsYosuke Akimoto, Akira Fujimoto, Yoshihiko Kurui, Ping Wang, Hiroaki Yamazaki
Estimating the term…
According to one embodiment, a sensor includes an element section including a first base and a first element. The first element includes a first fixed member fixed to the first base, a first connecting member supported by the first fixed member, and a first film portion supported by the first connecting member. A first gap is provided between the first base and the first film portion. The first film portion includes a first resistance layer, a first conductive layer, and a first conductive member. The first resistance layer does not overlap the first conductive layer in a first direction from the first base to the first fixed member. The first conductive member overlaps the first resistance layer and the first conductive layer in the first direction. A first electrical resistance of the first resistance layer changes according to a state of a detection target around the first element.
A sensor, comprising:
Dependencies are inferred from the claim text.