Integrated strain and piezoelectric sensor system
OwnerMasato Mizutainventor
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Abstract
Systems, devices, and methods for a dual-sensor apparatus (101), comprising: a conductive substrate (124); a piezoelectric material (126) disposed on the conductive substrate (124); and an electrically conductive trace (102) disposed on the piezoelectric material (126) in a strain gauge pattern, where the electrically conductive trace (102) comprises two leads; where the conductive substrate (124) and the electrically conductive trace (102) serve as electrodes for the piezoelectric material (126) to form a piezoelectric sensor; and where the electrically conductive trace (102) serves as a strain sensor.
Claims20
A dual-sensor apparatus (101), comprising:
- a conductive substrate (124);
- a piezoelectric material (126) disposed on the conductive substrate (124);
- and
- an electrically conductive trace (102) disposed on the piezoelectric material (126) in a strain gauge pattern, wherein the electrically conductive trace (102) comprises two leads;
- wherein the conductive substrate (124) and the electrically conductive trace (102) serve as electrodes for the piezoelectric material (126) to form a piezoelectric sensor;
- and
- wherein the electrically conductive trace (102) serves as a strain sensor.
A segmented dual-sensor apparatus (201), comprising:
- a conductive substrate (232);
- a piezoelectric material (234) disposed on the conductive substrate (232);
- and
- a plurality of electrically conductive traces (202, 204) disposed on portions of the piezoelectric material (234) in respective strain gauge patterns, wherein each electrically conductive trace (202, 204) comprises two leads;
- wherein the conductive substrate (232) and the plurality of electrically conductive traces (202, 204) serve as electrodes for the piezoelectric material (234) to form a plurality of piezoelectric sensors;
- and
- wherein the plurality of electrically conductive traces (202, 204) serve as a plurality of strain sensors.
A method comprising:
- providing a conductive substrate (124);
- disposing a piezoelectric material (126) on the conductive substrate (124);
- and
- disposing an electrically conductive trace (102) on the piezoelectric material (126) in a strain gauge pattern, wherein the electrically conductive trace (102) comprises two leads;
- forming a piezoelectric sensor from the conductive substrate (124) and the electrically conductive trace (102), wherein the conductive substrate (124) and the electrically conductive trace (102) serve as electrodes for the piezoelectric material (126);
- and
- forming a strain sensor from the electrically conductive trace (102).
Dependencies are inferred from the claim text.