Inspection tool and inspection method

Abstract

The present invention provides an inspection tool and an inspection method, with which it is possible to easily discriminate whether or not irradiation with light having a wavelength of 222 nm and light having a wavelength of 254 nm is performed even under sunlight. The inspection tool of the present invention includes a sensing portion and a reference portion, in which the sensing portion includes a sensing layer which senses at least light having a wavelength of 200 to 254 nm, the reference portion includes the sensing layer and a transparent layer, and the transparent layer satisfies a relationship of Expressions (1) and (2), 0%≤TMA200 to 254<15.0%  Expression (1) 50.0%<TMI360 to 800≤100%  Expression (2) in Expression (1), TMA200 to 254 represents a maximum transmittance of the transparent layer in a wavelength range of 200 to 254 nm. in Expression (2), TMI360 to 800 represents a minimum transmittance of the transparent layer in a wavelength range of 360 to 800 nm.

Dependencies are inferred from the claim text.