Apparatus of vision chromatic confocal sensor based on a geometrical phase lens

An apparatus of a vision chromatic confocal sensor, comprising:

• a light source unit generating incident light;
• an optical circulator receiving the incident light from the light source unit;
• a light conversion unit including a geometrical phase lens, and modulating the incident light received from the optical circulator and emitting incident light in which chromatic aberration is expressed to a specimen, and receiving reflected light reflected from the specimen;
• a stage at which the specimen to which the incident light emitted from the light conversion unit is irradiated is located;
• a beam splitter splitting the reflected light reflected by the specimen;
• a measurement unit detects the reflected light transmitted through the beam splitter and received by the light conversion unit;
• and
• a monitoring unit detecting the reflected light reflected by the beam splitter,
• wherein the measurement unit includes
• a collimating lens modulating the incident light received from the optical circulator into parallel light,
• a geometrical phase lens disposed at a rear stage from the collimating lens along a progress path of the incident light, and
• a first phase retardation plate disposed behind the geometrical phase lens along the progress path of the incident light.