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US 12,613,088 B2Granted
Strain gauge including barrier layer over resistor body
AssigneeMINEBEA MITSUMI Inc.
InventorsShintaro Takata, Shinya Toda, Toshiaki Asakawa
Life of this patent
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Abstract
A strain gauge includes a flexible substrate, a resistor on one surface of the substrate, an insulating layer covering the resistor, and a conductive barrier layer covering the insulating layer. The conductive barrier layer includes a first layer portion extending over a surface of the resistor via the insulating layer, and a second layer portion extending over side surfaces of the resistor via the insulating layer and continuously connected to the first layer portion.
Claims7
A strain gauge comprising:
- a flexible substrate;
- a resistor made from a film containing Cr, CrN, and Cr2N, on one surface of the substrate;
- an insulating layer covering the resistor;
- and
- a conductive barrier layer covering the insulating layer,
- wherein the conductive barrier layer includes
- a first layer portion extending over a surface of the resistor via the insulating layer, and
- a second layer portion extending over side surfaces of the resistor via the insulating layer, and continuously connected to the first layer portion.
5 more elements
Dependencies are inferred from the claim text.