Vacuum pump
AssigneeShimadzu Corporation
InventorsHiroaki Kimura, Masashi Manabe, Takahiro Saeki
Life of this patent
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Abstract
To reduce deformation of a stator in an upper-lower direction. A vacuum pump includes a rotor housed in a housing and rotationally driven, plural stages of rotor blades provided in the rotor, and plural stages of stators, each of which is disposed between adjacent ones of the plural stages of rotor blades. The stator has an inner peripheral rib, an outer peripheral rib, and a stator blade connecting the inner peripheral rib and the outer peripheral rib, and is housed in the housing in a state of the outer peripheral rib being sandwiched between spacers. At least part of the outer peripheral rib of the stator is provided with a deformable portion configured to allow deformation of the inner peripheral rib and/or the stator blade in a radial direction.
Claims6
A vacuum pump comprising:
- a rotor housed in a housing and rotationally driven;
- plural stages of rotor blades provided in the rotor;
- and
- plural stages of stators, each of which is disposed between adjacent ones of the plural stages of rotor blades,
- wherein each stator includes an inner peripheral rib, an outer peripheral rib, and a stator blade connecting the inner peripheral rib and the outer peripheral rib, and is housed in the housing in a state of the outer peripheral rib being sandwiched between spacers, and
- at least part of the outer peripheral rib is provided with a deformable portion configured to allow, in a state where the outer peripheral rib is sandwiched between the spacers, deformation of the inner peripheral rib and/or the stator blade in a radial direction due to a temperature change of the stator to reduce deformation of the inner peripheral rib and/or the stator blade in a rotation axis direction due to the temperature change of the stator.
Dependencies are inferred from the claim text.