Method for manufacturing free-standing single-crystal membrane having perovskite structure, and method for transferring free-standing single-crystal membrane having perovskite structure

Abstract

The present invention provides a method for manufacturing a free-standing single-crystal membrane having a perovskite structure, the method comprising: applying an oxygen-deficient perovskite sacrificial layer having an ACuO2 structure (where A is at least one selected from the group consisting of calcium (Ca), strontium (Sr), and barium (Ba)) on a substrate; epitaxially growing a single-crystal membrane having a perovskite structure on the sacrificial layer; and selectively removing the sacrificial layer using an etchant, and provides a method for transferring a free-standing single-crystal membrane having a perovskite structure by using the method for manufacturing a free-standing single-crystal membrane having a perovskite structure.

Dependencies are inferred from the claim text.