Noble metal vapor deposition material
AssigneeMatsuda Sangyo Company Limited
InventorsTakahiro Kobayashi, Atsushi Kawashimo
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Abstract
An object of the present disclosure is to provide a noble metal vapor deposition material for use in a vacuum vapor deposition method capable of suppressing the occurrence of the bumping phenomenon during vacuum vapor deposition. Provided is a vapor deposition material composed of a noble metal, wherein, when a surface area of 50 μm×50 μm of the vapor deposition material is analyzed using energy dispersive X-ray spectroscopy, Fe is less than 10 wt %, and when analysis is performed using ICP atomic emission spectroscopy, Fe is 10 wtppm or less.
Claims1
A rod-shaped vapor deposition material pellet composed of platinum, wherein, when a surface area of 50 μm×50 μm of the vapor deposition material pellet is analyzed using energy dispersive X-ray spectroscopy, Fe is 10 wt % or less, Si is 10 wt % or less, and C is 10 wt % or less, when analysis is performed using ICP (Inductively Coupled Plasma) atomic emission spectroscopy, Fe is 10 wtppm or less, and Si is 10 wtppm or less, and when analysis is performed using non-dispersive infrared, C is less than 10 wtppm.
Dependencies are inferred from the claim text.