Substrate holder, substrate holding method, and film formation apparatus

A substrate holding method by a substrate holder including:

• a hole portion in which a disk-shaped substrate is placed upright;
• and at least four supporting members attached elastically-deformably on a periphery of the hole portion, the substrate holding method comprising the substrate holder performing:
• supporting the disk-shaped substrate at a first-side circumferential end portion and a second-side circumferential end portion of the disk-shaped substrate by two supporting members of the four supporting members, the first-side circumferential end portion and the second-side circumferential end portion being positioned at vertical-direction upper positions of the disk-shaped substrate;
• and
• supporting the disk-shaped substrate at a third-side circumferential end portion and a fourth-side circumferential end portion of the disk-shaped substrate by remaining two supporting members of the four supporting members, the third-side circumferential end portion and the fourth-side circumferential end portion being positioned at vertical-direction lower positions of the disk-shaped substrate,
• wherein each of a first central angle and a second central angle is in a range of from 15° through 40°, the first central angle being a central angle in the disk-shaped substrate between the first-side circumferential end portion and an uppermost end portion of the disk-shaped substrate that is positioned at a vertical-direction uppermost position of the disk-shaped substrate, and the second central angle being a central angle in the disk-shaped substrate between the second-side circumferential end portion and the uppermost end portion, and
• each of a third central angle and a fourth central angle is in a range of from 10° through 15°, the third central angle being a central angle in the disk-shaped substrate between the third-side circumferential end portion and a lowermost end portion of the disk-shaped substrate that is positioned at a vertical-direction lowermost position of the disk-shaped substrate, and the fourth central angle being a central angle in the disk-shaped substrate between the fourth-side circumferential end portion and the lowermost end portion.