Laser scribing device

A laser scribing device comprising:

• a laser for emitting a laser beam;
• a beam splitter for dividing the laser beam into a first laser beam and a second laser beam;
• a beam expander telescope for modifying a divergence angle of at least one of the first and the second laser beams,
• wherein the beam expander telescope comprising one or more optical components, and
• wherein the divergence angle is modified by adjusting a position of at least one of the optical components;
• a beam combiner for combining the first laser beam and the second laser beam and emitting coaxially the first laser beam and the second laser beam;
• and
• a focusing lens to create a first focal point for the first laser beam and a second focal point for the second laser beam inside a target substrate;
• wherein the first focal point and the second focal point have different focal lengths,
• wherein a first focal length of the first focal point is a distance between the focusing lens and the first focal point,
• wherein a second focal length of the second focal point is a distance between the focusing lens and the second focal point,
• wherein at least one of the first and the second focal lengths is adjusted by the beam expander telescope by modifying the divergence angle of at least one of the first and second laser beams, and
• wherein a first scribing line and a second scribing line are simultaneously generated by each focal point of the first focal point and the second focal point respectively by translating the target substrate.