X-ray inspection apparatus and inspection method of x-ray sensor unit

An X-ray inspection apparatus comprising:

• a conveyance unit configured to convey an article;
• an irradiation unit configured to irradiate the article conveyed by the conveyance unit with X-rays;
• an X-ray sensor unit including a sensor unit configured to detect the X-rays by photon counting and an image generation unit configured to generate an image based on a detection result output from the sensor unit;
• a control unit having a first mode for inspecting the article based on the image and a second mode for determining a state of the X-ray sensor unit at a time of time delay integration driving;
• and
• a sensitivity correction unit configured to perform sensitivity correction of the sensor unit based on the X-rays not transmitted to the article, wherein
• in the second mode,
• the sensor unit is configured to detect X-rays not transmitted to the article, and
• the control unit is configured to compare a first image generated based on a detection result output from the sensor unit at a time t1 with a second image generated by integrating detection results output from the sensor unit until a time t2 after the time t1 to determine the state of the X-ray sensor unit at the time of time delay integration driving, when the sensitivity correction is performed by the sensitivity correction unit.