Piezoelectric device having an insulating portion overlapping electrode opening

A piezoelectric device comprising:

• a support member having a support surface;
• and
• a vibrating portion stacked on the support surface in a stacking direction, wherein
• the vibrating portion includes
• a first electrode, a piezoelectric film and a second electrode that are arranged adjacently in the stacking direction, and an insulating portion configured to increase an electric resistance value between the first electrode and the second electrode,
• the first electrode is arranged on the support surface, and is provided with (i) an opening penetrating through the first electrode in the stacking direction, and (ii) a first electrode surface that is a surface opposite to the support surface,
• the piezoelectric film is provided to extend across the opening on the first electrode surface, and is provided with a piezoelectric film surface that is a surface opposite to the first electrode surface,
• the second electrode is provided on the piezoelectric film surface, and
• the insulating portion is provided at a position between the first electrode and the second electrode, and at least a part of the insulating portion overlaps with the opening of the first electrode in the stacking direction.