Laminated structure
AssigneeJapan Display Inc.
InventorsMasumi Nishimura, Shinichiro Oka, Hiroumi Kinjo, Hayata Aoki
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Abstract
A laminated structure includes a substrate, and a gallium nitride film on the substrate. Further, a laminated structure includes a substrate, an alignment layer having a c-axis orientation or a (111) orientation of a face-centered cubic structure, over the substrate, and a gallium nitride film on the alignment film. Furthermore, a laminated structure includes a substrate, a protective layer on the substrate, an alignment layer having a c-axis orientation or a (111) orientation of a face-centered cubic structure, over the protective layer, and a gallium nitride film on the alignment film. A surface arithmetic mean roughness (Ra) of a surface of the substrate is less than 0.33 nm.
Claims19
A laminated structure comprising:
- a substrate;
- an alignment layer having a c-axis orientation or a (111) orientation of a face-centered cubic structure, over the substrate;
- and
- a gallium nitride film on the alignment film,
- wherein a surface arithmetic mean roughness (Ra) of a surface of the substrate is less than 0.33 nm.
A laminated structure comprising:
- a substrate;
- a protective layer on the substrate;
- an alignment layer having a c-axis orientation or a (111) orientation of a face-centered cubic structure, over the protective layer;
- and
- a gallium nitride film on the alignment film,
- wherein a surface arithmetic mean roughness (Ra) of a surface of the substrate is less than 0.33 nm.
Dependencies are inferred from the claim text.